Residual Gas Analyzer Specifications

Residual Gas Analyzer Models XTx00(M)

Mass range

 
         XT100 1 to 100 amu Faraday cup (FC)
         XT200 1 to 200 amu Faraday cup (FC)
         XT300 1 to 300 amu Faraday cup (FC)
         XT100M 1 to 100 amu Faraday cup (FC) and Electron Multiplier (EM)
         XT200M 1 to 200 amu Faraday cup (FC) and Electron Multiplier (EM)
         XT300M 1 to 300 amu Faraday cup (FC) and Electron Multiplier (EM)

Mass filter type

Quadrupole

Detector type

Faraday cup (FC), Standard Electron Multiplier (EM), Optional

Resolution

Better than 0.5 amu @ 10% peak height. Adjustable to constant peak width throughout the mass range.

Sensitivity (A/Torr)

5 x 10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and2 mA electron emission.

Minimum detectable
partial pressure

Measured with N2 @ 28 amu with 1 amu full peak width, 10% height,  70eV     electron energy, 6 eV ion energy, and 2 mA electron emission.
Faraday cup 5 x 10-12
Electron multiplier 5 x 10-14

Operating range

UHV to Atmosphere
Pirani gauge 10-3 Torr to ATM
Ion Gauge operation below 10-2 Torr
Partial Pressures operation below 10-4 Torr

Operating temperature

50 °C Electronics, 100 °C Probe

Bakeout temperature

300 °C (Probe only, CCU removed)

Total pressure
measurement

 
Pirani gauge 10-3 Torr to ATM
Ion Gauge 2 x 10-10 Torr to 10-2 Torr

Probe Materials

SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel, Thoria, Platinum

Ionizer Design

Open ion source, electron impact ionization

Filament

Dual thoria coated iridium with firmware protection. Built-in 1 to 30W degas ramp-up. Field replaceable.

Electron energy

11 to 150V, programmable

Ion energy

1 to 12V, programmable

Focus Voltage

0 to 150V, programmable

Electron emission
current

0.1 to 4 mA, programmable

Probe Dimensions

6.8” from flange face to top of ionizer

Probe mounting
flange

2.75” CF

Minimum tube I.D.

1.375”

CCU Dimensions

3.3” x 4.8” x 7.4”, Easily separated from probe for bakeout.

CCU Extension 

6.2” from flange face with mounting hardware.

Warm-up time

Mass stability ± 0.1 amu after 30 minutes.

Computer Interface

RS-232C, up to 115,200 baud, or USB.

Minimum PC
Requirements

PC running Windows 2000, XP, 7, 8, or 10 with 1024 x 768 VGA graphics, keyboard, mouse, CD ROM Drive, and 1 Unused USB or RS-  232C Port.

Software

Included VacuumPlus Windows based application.

Power requirement

24 VDC @ 2.5 Amps. 120/240 VAC adaptor included.

Weight

9 lbs. Total, Probe and CCU.