Support

Extorr RGA with spectra

Introduction to Residual Gas Analyzers

  • Operating pressure information
  • Mean free path limits
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Servicing XTx00 RGA probes, SN 1-999

  • These probes had a one piece filament, ionizer and ion gauge. They are field upgradeable to the ionizer with separate dual thoria coated filaments. See the next section if you are upgrading.
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Servicing XTx00 RGA probes, SN 1000+

  • These probes have a separately replaceable, dual filament and ionizer.
none provided

Servicing the CCU for the XTx00 Residual Gas Analyzers

  • Complete diagrams for the do-it-yourselfer