Probe Manifolds
XT Series Probe Manifolds are high conductance vacuum tees for connecting a gas inlet valve and an Extorr quadrupole probe to a high vacuum pump. The manifolds maintain a high pumping speed to the RGA for less background gas interference. All manifolds are made from 304 stainless steel and have 2 x 2.75-inch (DN 40 CF) ConFlat (CF) flanges for the RGA Probe and inlet. XT Probe Manifold pump flanges are available to fit most turbomolecular vacuum pumps. Stainless steel mounting hardware and copper gaskets for the CF flanges are included with the XT Probe Manifold.
Specifications
Specification | Value |
---|---|
Material | 304 stainless steel |
Mounting Hardware Supplied (all models) | 12 pcs. ¼-28 x 1.50 inch SS bolts, nuts, flat washers, 2 x 2 ¾ inch CF copper gaskets |
Weight | 5 lbs |
RGA and Inlet Flanges | 2 X 2 ¾ inch CF (DN 40 CF) non-rotatable |
MAN450C - Pump Flange, Extra Hardware | 4.50 inch CF (DN 63 CF) non-rotatable flange, 6 pcs ¼ -28 x 1.5 inch SS bolts, nuts, flat washers, and 4.50 inch (DN 63 CF) copper gasket |
MAN63S - Pump Flange, Extra Hardware | ISO 63 flange with elastomer o-ring and mounting bolts |
MAN40K - Pump Flange, Extra Hardware | DN 40 KF flange with elastomer o-ring and mounting bolts |
Downloads
File Name | Document Type | Date | File Size | |
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XT Series Probe Manifold Datasheet | PDF | 2023-01-10 | 619 KB |