Support

Software Updates

Manual, Quick Start Guide, and Datasheet

XT Series RGA Configuration File Download

Extorr RGA with spectra

Introduction to Residual Gas Analyzers

  • Operating pressure information
  • Mean free path limits
none provided

Servicing XTx00 RGA probes, SN 1-999

  • These probes had a one piece filament, ionizer and ion gauge. They are field upgradeable to the ionizer with separate dual thoria coated filaments. See the next section if you are upgrading.
none provided

Servicing XTx00 RGA probes, SN 1000+

  • These probes have a separately replaceable, dual filament and ionizer.
none provided

Servicing the CCU for the XTx00 Residual Gas Analyzers

  • Complete diagrams for the do-it-yourselfer